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| 公告日期 | 2018-10-31 |
|---|---|
| 公告 | [演講公告]11/6(二)15:10 Dr. Umberto Celano演講 |
| 內容 | 日期: 星期二, 2018年11月6日 時間: 3:10pm (80分鐘演說包括Q&A約5-10分鐘) 地點: 台灣台南成功大學機械系一樓 三星講堂 講者: Dr. Umberto Celano 單位: Imec 主持人: Prof. Torbjörn Nordling (吳馬丁教授) 講題: Three-dimensional nanoscale characterization of confined volumes 摘要: With the introduction of 3D devices and stackable architectures in both logic and memory applications, the physical characterization of 3D nano-sized volumes is becoming of paramount importance. Furthermore, for specific applications the characterization cannot be limited to the observation but it has to incorporate the electrical properties of the sample. Therefore, the main requirements for a valuable 3D characterization technique are: (1) nano-scale sensitivity for morphological and electrical features and (2) capability to expand from 2D (surface analysis) towards probing in the three dimensions. Here, scanning probe microscopy (SPM) tomography (often referred to as Scalpel SPM) is proposed as an approach for three-dimensional characterization of confined volumes. After introducing the fundamentals of high-pressure tip-induced material removal, the controlled sub-nm slice-and-view capability is demonstrated for different materials leading to the characterization of highly confined volumes (< 1000 nm3). This is applied here to various emerging devices including logic and memory with emphasis on filamentary- and areal-type resistive switching for the interpretation of the switching mechanisms and failure modes. |
| 公告人員 | 系辦 |
| 附件 | 無 |